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Motion Stages for Wafer Metrology

  • Highest positioning accuracy due to zero backlash
  • Unmatched position stability with power off
  • Extremely compact footprint & low profile
  • Ultra high resolution

Johnson Electric provides Piezo motors and stages for global leaders in the semiconductor manufacturing industry. Marketed under our Nanomotion brand, our industrial, vacuum compatible and non-magnetic motors are used in conjunction with FB stages. Precision linear and rotary stages are used for clean room and vacuum environments. Custom stages are also designed in conjunction with semiconductor market leaders for open frame and small footprint applications. Our two, three and four axis stages operate from 1µm to 1nm position resolution for small area inspection of semiconductor materials.

德昌电机基于广泛和创新的技术平台,提供了独特的系统解决方案。
  • Standard atmosphere and vacuum compatible configurations
  • Wide range of sizes and travels
  • Easily configurable in multi-axis
  • Direct drive Piezo technology

Johnson Electric's precision linear and rotary stages are used for clean room and vacuum environments. Custom stages are also designed in conjunction with semiconductor market leaders for open frame and small footprint applications. Our two, three and four axis stages operate from 1µm to 1nm position resolution for small area inspection of semiconductor materials.

德昌电机基于广泛和创新的技术平台,提供了独特的系统解决方案。
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